{"id":342,"date":"2025-11-18T15:14:44","date_gmt":"2025-11-18T15:14:44","guid":{"rendered":"https:\/\/laserlithography.science\/?p=342"},"modified":"2025-11-18T15:14:46","modified_gmt":"2025-11-18T15:14:46","slug":"study-on-phase-change-material-vxoy-%d1%96-probing-nanomecanical-properties-of-vxoy-films","status":"publish","type":"post","link":"https:\/\/laserlithography.science\/?p=342&lang=en","title":{"rendered":"Study on phase change material VxOy: (\u0406) probing nanomecanical properties of VxOy films"},"content":{"rendered":"\n<figure class=\"wp-block-image size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"335\" height=\"270\" src=\"https:\/\/laserlithography.science\/wp-content\/uploads\/2025\/11\/Picture5.png\" alt=\"\" class=\"wp-image-262\" srcset=\"https:\/\/laserlithography.science\/wp-content\/uploads\/2025\/11\/Picture5.png 335w, https:\/\/laserlithography.science\/wp-content\/uploads\/2025\/11\/Picture5-300x242.png 300w\" sizes=\"(max-width: 335px) 100vw, 335px\" \/><\/figure>\n\n\n\n<p>Result: From AFM-data established an increase in hardness from 0.9 GPa in an amorphous single layer to 11\u201318 GPa in polycrystalline thick (~0.5 \u03bcm) films obtained by multi-stage deposition and annealing.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"695\" height=\"291\" src=\"https:\/\/laserlithography.science\/wp-content\/uploads\/2025\/11\/Picture4.png\" alt=\"\" class=\"wp-image-264\" srcset=\"https:\/\/laserlithography.science\/wp-content\/uploads\/2025\/11\/Picture4.png 695w, https:\/\/laserlithography.science\/wp-content\/uploads\/2025\/11\/Picture4-300x126.png 300w\" sizes=\"(max-width: 695px) 100vw, 695px\" \/><\/figure>\n\n\n\n<p>The phase composition was monitored by Raman spectroscopy (fig) and XRD (not shown).<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Result: From AFM-data established an increase in hardness from 0.9 GPa in an amorphous single layer to 11\u201318 GPa in polycrystalline thick (~0.5 \u03bcm) films obtained by multi-stage deposition and annealing. The phase composition was monitored by Raman spectroscopy (fig) and XRD (not shown).<\/p>\n","protected":false},"author":1,"featured_media":262,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"class_list":["post-342","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category---en"],"_links":{"self":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts\/342","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=342"}],"version-history":[{"count":1,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts\/342\/revisions"}],"predecessor-version":[{"id":343,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts\/342\/revisions\/343"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/media\/262"}],"wp:attachment":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=342"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=342"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=342"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}