{"id":344,"date":"2025-11-18T15:16:10","date_gmt":"2025-11-18T15:16:10","guid":{"rendered":"https:\/\/laserlithography.science\/?p=344"},"modified":"2025-11-18T15:16:11","modified_gmt":"2025-11-18T15:16:11","slug":"study-on-phase-change-material-vxoy-%d1%96%d1%96-tuning-the-local-properties-of-vxoy-by-laser-processing","status":"publish","type":"post","link":"https:\/\/laserlithography.science\/?p=344&lang=en","title":{"rendered":"Study on phase change material VxOy: (\u0406\u0406) Tuning the local properties of VxOy by laser processing"},"content":{"rendered":"\n<ul class=\"wp-block-list\">\n<li>Substrate heating increases the uniformity of laser processing, reducing the power density required while maintaining the same effect, and minimizing thermal stresses between the heated film and the cooler substrate, as well as the corresponding effects (cracking, delamination, curling, etc.).<\/li>\n\n\n\n<li>Processing at low power density can assist in surface cleaning (removal of adsorbed layers, oxides, etc.).<\/li>\n\n\n\n<li>Processing at power density of (0.5\u20130.9)\u00d710<sup>5<\/sup> W\/cm<sup>2<\/sup> and substrate temperature of 150\u00b0C promotes the crystallization of the amorphous film with the formation of a nanograin structure with sizes of 50\u2013100 nm and 150\u2013300 nm, respectively.<\/li>\n\n\n\n<li>At a power density of ~10<sup>5<\/sup> W\/cm<sup>2<\/sup> , microdroplets of VO<sub>x<\/sub> with sizes of 1\u20132 \u00b5m are formed, exhibiting strong longitudinal texture influenced by the substrate relief. The height of the droplets is 120-180 nm.<\/li>\n\n\n\n<li>Raman spectroscopy confirmed laser-induced crystallization of amorphous vanadium oxide with the formation of certain polytypes depending on laser power density and substrate temperature.<\/li>\n\n\n\n<li>Laser annealing at room temperature resulted mainly in the crystallization V<sub>2<\/sub>O<sub>5<\/sub> phase.<\/li>\n\n\n\n<li>Combined influence of substrate heating of 150\u00b0C and high power density of (1.3-1.8)\u00d710<sup>5<\/sup> W\/cm<sup>2<\/sup> allowed for the formation of VO<sub>2<\/sub>(\u041c2) crystalline phase, while mixture of VO<sub>2<\/sub><sub> <\/sub>\u0442\u0430 V<sub>2<\/sub>O<sub>5<\/sub> phases was formed at moderate power density of (0,5-1,3)\u00d710<sup>5<\/sup> W\/cm<sup>2<\/sup>.\u00a0<\/li>\n<\/ul>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":264,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"class_list":["post-344","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category---en"],"_links":{"self":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts\/344","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=344"}],"version-history":[{"count":1,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts\/344\/revisions"}],"predecessor-version":[{"id":345,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/posts\/344\/revisions\/345"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=\/wp\/v2\/media\/264"}],"wp:attachment":[{"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=344"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=344"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/laserlithography.science\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=344"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}