Comparison of direct laser lithography and traditional optical lithography applicable to traditional photoresists

In cooperation with the Institute for Information Recording of National Academy of Sciences of Ukraine (this cooperation was established as a part of fulfilling the organizational tasks of the project)
We compared the capabilities of common mask optical lithography (left) and home-built direct laser writing lithography tool (right) available at the Institute for Information Recording and demonstrated the advantages of the direct laser lithography/writing …