Equipment

Equipment purchased as part of the project

Laser engravers for performing tasks involving low-resolution (tens of micrometers) maskless lithography

Technical specifications:

Product model ATOMSTACK M4

Engraving size 70*70 mm

Peak optical power in pulse 20 kW

Laser wavelength 1064 nm

Marking repeatability ≤0.01 mm

Marking speed 12 m/s

Fume hoods and spinners for applying thin layers of photoresist in clean room conditions.

POLOS ® PM-100 (planned purchase in 2025)

The optimal option for manufacturing microelectronic components at the stage of research and development of new materials and device architectures