Establishment of the State Key Laboratory
“Center for Critical Optoelectronic Micro/Nano Technologies and Expertise”

NRFU Grant No. 2023.05/0022
“Research infrastructures for conducting cutting-edge scientific research”

Latest achievements

Project goal:

Creation of a comprehensive infrastructure (future state key laboratory) that will include equipment and the expertise of scientific and technical personnel to solve specific micro- and optoelectronics tasks, such as the development of critical components of a known design and world-class fundamental research for new materials and devices. Taking into account the current needs of the country and trends in global science, such infrastructure will specialize in sensor, MEMS, IR, and THz structures.

Team

Volodymyr Dzhagan

Head
physics and optical spectroscopy of semiconductor nanostructures

Alexei Nazarov

physics and technology of semiconductor devices

Andrii Vasin

synthesis and characterization of thin films

Serhii Kukhtaruk

theoretical and numerical calculations and expertise in THz topic

Andrii Korchovyi

scanning probe microscopy

Viktor Strelchuk

optical spectroscopy

Kateryna Svezhentsova

optical lithography and laser lithorgaphy

Andrii Rusavsky

technology and electrical characterization of thin films

Oleksandr Dubikovskyi

thin films deposition

Oleksandr Kulbachynskyi

optical lithography and laser lithorgaphy

Project description:

The rapid development of all modern technologies is largely based on the advancement and availability of electronic components that enable the functioning of most things familiar to us — from a TV remote to artificial intelligence. For many years, the cutting edge of technology has been associated with achieving the smallest possible dimensions of semiconductor structures. In particular, processors based on 2 nm technology are already a reality. However, this also means that further technological progress through miniaturization is becoming impossible, creating the need to search for alternative materials and concepts. Moreover, there is a vast number of applications that either do not require such critically small dimensions — such as various types of sensors — or cannot be implemented in nanometer-scale devices due to fundamental physical limitations. In particular, optoelectronic technologies, especially in the infrared and terahertz ranges, are only possible with components comparable in size to the wavelength of the corresponding range — that is, from submicrometer to tens of micrometers. Therefore, an active search for new materials or new ways to utilize them more effectively continues relentlessly in the field of micron-scale technologies. This project aims to establish the infrastructure required for the use of maskless photolithography (MPL), which would enable the development of micro- and optoelectronic devices of a wide range of architectures and applications. MPL technology allows the formation of functional elements of arbitrary shapes, similar to a laser engraver — by “drawing” with an optical (laser) beam on a photoresist film or an active element. The shape and dimensions of the components can be easily modified in the software settings, which significantly accelerates the development process of a specific microelectronic device, as it eliminates the need to manufacture a photomask each time — a complex and costly technology that is practically unavailable in Ukraine. At the first (reporting) stage of the project, a study was carried out to investigate the possibility of controlled modification of the properties of different types of materials using commercial laser engravers. This was a preparatory stage intended to identify the most promising materials and irradiation regimes (wavelength, power, pulsed or continuous operation). Based on the collected data, the next stages of the project will focus on refining the technology of high-resolution maskless photolithography using a modern photolithography system planned for purchase next year.

Project Advisory Board:

Prof. Dietrich R.T. Zahn
Head of semiconductor physics group, TU Chemnitz, Germany, vice director for science of the Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN).
Prof. Svetlana Vitusevich
Head of the department of microelectronics, Forschungszentrum Jülich GmbH, Germany.
Prof. Jean Pierre Raskin
Head of the laboratory of sensors, microsystems and actuators, Louvain School of Engineering, Université catholique de Louvain, Belgium.
Prof. Max Lemme
Head of the Chair of electronic devices, Aachen university, Germany.
Prof. Wojciech Knap
Head of CENTERA (Center for Terahertz Research and Applications), Poland.
Prof. Andriy Romanyuk
Head of R&D of Glas Trösch AG, and physics professor Basel University, Basel, Switzerland.